Ecorecycling. Recovery and recycling system of PFC for semiconductor manufacturing.
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Accession number;99A0272966
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| Title;Ecorecycling. Recovery and recycling system of PFC for semiconductor manufacturing. |
| Author;
NOZAWA SHIGESADA
(Nihon'earikido)
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Journal Title;Plant and Process
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Journal Code:G0109A
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ISSN:0368-4849
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VOL.;NO.;PAGE.189-193(1999)
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| Figure&Table&Reference;FIG.7, TBL.3 |
| Pub. Country;Japan |
| Language;Japanese |
| Abstract;PFC (carbon-fluorine system gas - CF4, C2F6, CHF3, C3F8, C4F8 for etching and chamber cleaning of semiconductor manufacturing processes) influences the global warming semipermanently without decomposing in the atmosphere. The value of global warming potentials (GWPLT) of CF4 on the basis of gas life is 540000, and the emission reduction of PFC is an important issue viewing mid-and-long terms. CF6 and C2F6 accounts for 80% of PFC used for semiconductor manufacturing. For the concentration and recovery of PFC, the membrane method,the cryogenic technique, and the pressure swing adsorption method are compared, and the distillation purification recycling technique is evaluated. The PFC recovery technique by the membrane method was developed aiming at the recycling of NF3 for cost reduction. The flow of the membrane method is presented, and its issues and future direction are indicated. |
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