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Accession number;99A0233736
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| Title;Semicon Japan 98. Static-eliminating capability of double injection ionizers. |
| Author;
IMAZONO HIROYUKI
(Shokugyonoryokukaihatsudaigakko)
OKANO KAZUO
(Shokugyonoryokukaihatsudaigakko)
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Journal Title;Jissen Kyoiku
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Journal Code:L0045A
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ISSN:0912-9111
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VOL.14;NO.1;PAGE.43-48(1999)
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| Figure&Table&Reference;FIG.9, REF.5 |
| Pub. Country;Japan |
| Language;Japanese |
| Abstract;This paper presents the structure and static-eliminating capability of the above ionizer announced in Seminar Show held in Makuhari Messe, Chiba, from December 2 to 4 in 1998 and reports the results: Ion injection quantity depends largely on the length of the nozzle tip; and the longer the tip is, the less the quantity is. |
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