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Accession number;99A0233740
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| Title;Fine processing system construction. Design and production of clean booth for oxidation diffusion. |
| Author;
HARUGUCHI YOSHIHIRO
(Fukuyamashokugyonoryokukaihatsutandai)
ICHIDA KENJI
(Fukuyamashokugyonoryokukaihatsutandai)
TERASHIGE TAKASHI
(Fukuyamashokugyonoryokukaihatsutandai)
IKEDA SHUSAKU
(Fukuyamashokugyonoryokukaihatsutandai)
HIRASHIMA TAKAHIRO
(Fukuyamashokugyonoryokukaihatsutandai)
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Journal Title;Jissen Kyoiku
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Journal Code:L0045A
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ISSN:0912-9111
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VOL.14;NO.1;PAGE.58-60(1999)
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| Figure&Table&Reference;FIG.2, TBL.1, REF.6 |
| Pub. Country;Japan |
| Language;Japanese |
| Abstract;Since 1994, Fukuyama Polytechnic College has provided semiconductor technology training to the Bingo Semiconductor Technology Consortium through organizers' groups, in-business assistance, organizers group research and development and professional talent raising supports. In 1994 a handmade basic fine processing system was constructed, which is a system of clean and low-cost system construction with safety ensured. This paper reports this fine processing system, focusing on an example of producing a clean booth for an oxidation diffusion furnace. |
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