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Accession number;99A0272951
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| Title;Ecotechnology.Zero waste water discharge system in semiconductor factory. |
| Author;
ICHINO MASAYUKI
(Kajima Corp.)
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Journal Title;Plant and Process
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Journal Code:G0109A
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ISSN:0368-4849
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VOL.;NO.;PAGE.113-116(1999)
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| Figure&Table&Reference;FIG.8 |
| Pub. Country;Japan |
| Language;Japanese |
| Abstract;Zero waste water discharge system was constructed for semiconductor factory which uses a large quantity of pure water in washing processes and discharges a large quantity of effluent. The outline and features of the system which recycles water to the utmost. Waste water is divided into inorganic, organic and special organic wastewater treatment systems. Each wastewater is treated separately respectively and recovered. The outline of the system is described. The quantity of the wastewater is reduced to about 10% and running cost is reduced to one third. The system conforms to ISO14000. |
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