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Accession number;99A0272952
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| Title;Ecotechnology. Environmental technology in semiconductor factories. |
| Author;
OKUNO HARUOMI
(Mitsubishi Electr. Corp.)
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Journal Title;Plant and Process
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Journal Code:G0109A
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ISSN:0368-4849
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VOL.;NO.;PAGE.117-122(1999)
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| Figure&Table&Reference;FIG.9, TBL.2, REF.1 |
| Pub. Country;Japan |
| Language;Japanese |
| Abstract;The management with the consideration of environment is becoming important in the semiconductor industry. This paper introduced the measures taken by semiconductor factories of Mitsubishi Electric Corp. for the prevention of global warming, resource conservation, waste countermeasure, and control of the chemical substances for environmental conservation. Measures include energy saving by the reduction of power consumption in manufacturing processes and air conditioning, reduction of PFC used in etching and CVD processes, development of altanative gas and recycling. PRTR (Pollutant Release and Transfer Register) is incorporated into in-house chemical substance administration system and the data on chemical substances are automatically collected. |
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