Evaluation of Structure and Properties of Al-N-Co-Fe Thin Films Prepared by Reactive Sputtering.

Accession number;99A0488715
Title;Evaluation of Structure and Properties of Al-N-Co-Fe Thin Films Prepared by Reactive Sputtering.
Author; ROY A G (Tokyo Inst. Technol.) NITTONO O (Tokyo Inst. Technol.)
Journal Title;Abstracts. Meeting of JIM
Journal Code:S0988A
ISSN:1342-5730
VOL.124th;NO.;PAGE.315(1999)
Figure&Table&Reference;
Pub. Country;Japan
Language;English
Abstract;
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