New Cr-B-N Thin Films Deposited by R.F.-Plasma Assisted Magnetron Sputtering Method.

Accession number;99A0488716
Title;New Cr-B-N Thin Films Deposited by R.F.-Plasma Assisted Magnetron Sputtering Method.
Author; MIN Z (Osaka Univ.) NOSE M (Faculty Of Takaoka National Coll.) MAKINO Y (Osaka Univ.) NOGI K (Osaka Univ.)
Journal Title;Abstracts. Meeting of JIM
Journal Code:S0988A
ISSN:1342-5730
VOL.124th;NO.;PAGE.315(1999)
Figure&Table&Reference;
Pub. Country;Japan
Language;English
Abstract;
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