FIB/TEM Observation on Defect Structure of Si at DBTT.

Accession number;99A0489021
Title;FIB/TEM Observation on Defect Structure of Si at DBTT.
Author;
Journal Title;Abstracts. Meeting of JIM
Journal Code:S0988A
ISSN:1342-5730
VOL.124th;NO.;PAGE.417(1999)
Figure&Table&Reference;
Pub. Country;Japan
Language;English
Abstract;