Sample Preparation for Observation with High Resolution Scanning Electron Microscope (HRSEM) by Ion-beam Sputter Coating.

Accession number;99A0562719
Title;Sample Preparation for Observation with High Resolution Scanning Electron Microscope (HRSEM) by Ion-beam Sputter Coating.
Author; TAKIZAWA SHIGERU (Univ. of Tsukuba, Inst. of Geosci.) ONO YOSHIKI (Univ. of Tsukuba)
Journal Title;Journal of the Mineralogical Society of Japan
Journal Code:G0124A
ISSN:0454-1146
VOL.28;NO.2;PAGE.65-69(1999)
Figure&Table&Reference;FIG.3, REF.9
Pub. Country;Japan
Language;Japanese
Abstract;Ion-beam sputtering deposition is very useful to a nonconductive specimen-preparation technique for ultra-high to high resolution electron microscopy. Application of the sputtering has modified the ion-beam thinning apparatus for preparation of the sample for TEM. Effective use of our modified sputtering apparatus leads to a good conductivity of the Pt-coating composed of finer particles in 1.7nm diamerter, and a surface of crystal can be closely observed under magnification of more than 100,000. (author abst.)
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