Excimer Laser Micromachining and Microelectroforming.

Accession number;99A0913231
Title;Excimer Laser Micromachining and Microelectroforming.
Author; IKEDA HIROMICHI (Nagano Precis. Ind. Res. Inst.) ARAI RYOICHI (Nagano Precis. Ind. Res. Inst.) YONEKUBO SO (Nagano Precis. Ind. Res. Inst.) NARITA HIROSHI (Nagano Precis. Ind. Res. Inst.)
Journal Title;Naganoken Seimitsu Kogyo Shikenjo Kenkyu Hokoku
Journal Code:Z0751B
ISSN:0915-0730
VOL.;NO.12;PAGE.14-18(1999)
Figure&Table&Reference;FIG.8, TBL.1, REF.2
Pub. Country;Japan
Language;Japanese
Abstract;
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