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Accession number;99A0938087
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| Title;Study on the Integrated Circuit Technology of the Intelligent Image Processing Techniques. |
| Author;
MARUO KAZUYUKI
(Tohoku Univ.)
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Journal Title;Record of Electrical and Communication Engineering Conversazione, Tohoku University
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Journal Code:F0511A
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ISSN:0385-7719
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VOL.68;NO.1;PAGE.84-87(1999)
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| Figure&Table&Reference;FIG.9, TBL.1, REF.6 |
| Pub. Country;Japan |
| Language;Japanese |
| Abstract;This paper outlines a defect detection system which automatically extracts defect information from complicated background LSI patterns. Based on a scanning electron microscope(SEM) image, the defects on the water are characterized in terms of their locations, sizes and the shape of defects. For this purpose, the Hough Transform and wavelet transform, have been employed. In addition to improve the throughput of the defect detection, the implementation of the Hough Transform algorithm on VLSI hardware has been investigated. By experiments, it has been demonstrated that the system is very effective in defect identification and will be used as an integral part in future automatic defect pattern classification systems. (author abst.) |
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