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Errors Evaluation of Aero Bearing Table about Flat Disk Form Measurement.

Accession number;99A1001744

Title;Errors Evaluation of Aero Bearing Table about Flat Disk Form Measurement.

Author; MIYAJIMA TAKASHI (Ind. Res. Inst. of Nagano) KUDO SEIICHI (Ind. Res. Inst. of Nagano) KOSUGI TAKASHI (Ind. Res. Inst. of Nagano)

Journal Title;Naganoken Kogyo Shikenjo Kenkyu Hokoku

Journal Code:Y0010A

ISSN:0913-672X

VOL.18;NO.;PAGE.28-34(1999)

Figure&Table&Reference;FIG.8, TBL.7, REF.6

Pub. Country;Japan

Language;Japanese

Abstract;

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