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Accession number;99A0938099
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| Title;A Study of Reflectometry using Optical Spectral Domain Interference and Its Application. |
| Author;
FUNABA TADAYUKI
(Tohoku Univ.)
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Journal Title;Record of Electrical and Communication Engineering Conversazione, Tohoku University
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Journal Code:F0511A
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ISSN:0385-7719
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VOL.68;NO.1;PAGE.130-133(1999)
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| Figure&Table&Reference;FIG.7, REF.2 |
| Pub. Country;Japan |
| Language;Japanese |
| Abstract;Reflectometry using optical spectrum domain interference is the unique technique of measuring reflection without a mechanical shift. In this paper, reflectometry using optical spectrum domain interference was proposed and an analysis was performed with a deviced function of a spectrometer. The verification experiment and the measurement application were demonstrated. The power spectrum of the multi-mode laser and the super luminescent diode was approximated by the well-known function and analyzed a measurement characteristic. The validity of the analysis was confirmed by the experiment. A measurement system was constructed and analyzed the basic characteristic. Application to profile measurement and tomographic measurement was tried. If a distance from the reference plane was within 500.MU.m, a good result was obtained in profile measurement. Inside structure around the surface could be recognized in tomographic measurement. The fundamental theory of reflectometry using optical spectrum domain interference was established and its potential for the measurement application was shown. (author abst.) |
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