Introducing a workbook for photo-lithography. A textbook for practical training course for semiconductor process.

Accession number;00A0155084
Title;Introducing a workbook for photo-lithography. A textbook for practical training course for semiconductor process.
Author; TERASHIGE TAKASHI (Fukuyama Polytechnic Coll., JPN)
Journal Title;Jissen Kyoiku
Journal Code:L0045A
ISSN:0912-9111
VOL.14;NO.5;PAGE.37-38(1999)
Figure&Table&Reference;FIG.2, REF.6
Pub. Country;Japan
Language;Japanese
Abstract;The semiconductor industry is largely dependent on manufacturing machinery. And, among manufacturers contributing to the semiconductor process, there are many small-to-medium-sized enterprises. In the vicinity of Fukuyama city, such enterprises has established the "Bingo association for promotion of semiconductor technology". Fukuyama occupational ability development junior college school has been proceeding with technology assistance for enterprises under the above-said association, within the framework of business of the Employment promotion business group, etc.. In this paper, the present state of the ability development seminar is explained, together with the "workbook for photolithography" which was developed for the seminar.