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Accession number;99A0938074
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| Title;A Study of Micro Magnetic Sensors. |
| Author;
TAKEZAWA MASAAKI
(Tohoku Univ.)
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Journal Title;Record of Electrical and Communication Engineering Conversazione, Tohoku University
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Journal Code:F0511A
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ISSN:0385-7719
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VOL.68;NO.1;PAGE.36-39(1999)
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| Figure&Table&Reference;FIG.8, REF.4 |
| Pub. Country;Japan |
| Language;Japanese |
| Abstract;This paper examines high-frequency carrier-type thin-film magnetic field sensors, which are based on impedance changes caused by magnetic field dependence of permeability and skin effect at high frequencies. Investigations of CoNbZr films showed that the change permeability due to the applied de magnetic field can be explained by the bias susceptibility theory. Moreover, the impedance change of the sensor can be estimated quantitatively on the basis of the de field dependence of the permeability. Based on the studies. I also discussed the enhancement of the sensitivity and linearity of the sensor. Consequently, a high sensitivity of 3*10-6Oe and linearity of 0.70% was achieved. The specification should be enough for sensing the position of buried magnets under the road, being used for Intelligent Transport Systems which would guide cars automatically on highways. (author abst.) |
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