Science Links Japan | Studies on Electron Tunneling Cathode with Single Crystalline Multi layers.

Studies on Electron Tunneling Cathode with Single Crystalline Multi layers.

Accession number;99A0938076

Title;Studies on Electron Tunneling Cathode with Single Crystalline Multi layers.

Author; NEO YOICHIRO (Tohoku Univ.)

Journal Title;Record of Electrical and Communication Engineering Conversazione, Tohoku University

Journal Code:F0511A

ISSN:0385-7719

VOL.68;NO.1;PAGE.43-46(1999)

Figure&Table&Reference;FIG.5

Pub. Country;Japan

Language;Japanese

Abstract;The paper proposes a resonant tunneling electron emission cathode(RTC) fabricated by single crystalline multi layers and describes basic studies on the RTC. The resonant tunneling emission from a RTC was first demonstrated by using a GaAs-AlAs quantum structure. The epitaxial growth of Aluminum and Aluminum oxide thin films were examined to construct an ideal RTC and was successfully grown on a silicon substrate by a gas source molecular beam epitaxy using dimethyl-ethyl amine alane(DMEAA). Crystalline structure and properties of the grown films, such as orientation dependence of Al growth and optimum growth condition of Al2O3 on Si substrates were examined by RHEED, AFM, XPS and SEM. In addition, electrical properties of Al2O3 were studied by measuring the C-V characteristics in a MOS structure. (author abst.)

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