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Fine Patterning and Fabrication of Diamond Chips with Electron Beam and Focused-Ion Beam.

Accession number;00A0661076

Title;Fine Patterning and Fabrication of Diamond Chips with Electron Beam and Focused-Ion Beam.

Author; TANIGUCHI J (Sci. Univ. Tokyo, Chiba, Jpn) MIYAMOTO I (Sci. Univ. Tokyo, Chiba, Jpn)

Journal Title;New Diam Front Carbon Technol

Journal Code:L1952A

ISSN:1344-9931

VOL.10;NO.2;PAGE.79-95(2000)

Figure&Table&Reference;FIG.17, TBL.1, REF.15

Pub. Country;Japan

Language;English

Abstract;

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