Micromachining of Diamond Thin Film.

Accession number;00A0810915
Title;Micromachining of Diamond Thin Film.
Author; SHIBATA T (Hokkaido Univ., Sapporo, Jpn)
Journal Title;New Diam Front Carbon Technol
Journal Code:L1952A
ISSN:1344-9931
VOL.10;NO.3;PAGE.161-175(2000)
Figure&Table&Reference;FIG.8, REF.67
Pub. Country;Japan
Language;English
Abstract;