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Deposition of Ternary Boron-Carbon-Nitrogen(BCN) Layers by Thermal Decomposition of Tris(dimethylamino)boran.

Accession number;00A0840423

Title;Deposition of Ternary Boron-Carbon-Nitrogen(BCN) Layers by Thermal Decomposition of Tris(dimethylamino)boran.

Author; AIGNER K (Vienna Univ. Technol., Vienna, Aut) TANG X (Vienna Univ. Technol., Vienna, Aut) HAUBNER R (Vienna Univ. Technol., Vienna, Aut) LUX B (Vienna Univ. Technol., Vienna, Aut)

Journal Title;New Diam Front Carbon Technol

Journal Code:L1952A

ISSN:1344-9931

VOL.10;NO.4;PAGE.181-189(2000)

Figure&Table&Reference;FIG.8, TBL.1, REF.27

Pub. Country;Japan

Language;English

Abstract;

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