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Accession number;01A0231219
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| Title;Study on the reliability of analytical methods for the determination of uranium and thorium in semiconductor memory materials. |
| Author;
MITSUGASHIRA TOSHIAKI
(Inst. for Mater. Res., Tohoku Univ.)
HARA MITSUO
(Inst. for Mater. Res., Tohoku Univ.)
KIM P
(Vacum Met. Co., Ltd.)
NAKASHIMA KOICHI
(Umatkyushu)
NAKAYAMA KOJI
(Umatkyushu)
KUROIWA YOICHI
(Umatkyushu)
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Journal Title;Abstracts of Papers. Symposium on Radiochemistry
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Journal Code:F0139B
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ISSN:1345-2762
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VOL.44th;NO.;PAGE.62(2000)
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| Figure&Table&Reference; |
| Pub. Country;Japan |
| Language;Japanese |
| Abstract;Elimination and the ultra trace analysis of uranium and thorium in memory device materials are important research targets in modern semiconductor industry. Commonly used analytical methods such as RNAA, ICP-MS, GD-MS is valid for long life alpha-emitters and the probability of soft errors is evaluated by assuming the radioequilibrium in natural alpha-decay series without the direct determination of daughter alpha-emitters. Authors compared the analytical results of high-purity aluminum obtained by RNAA, ICP-MS, GD-MS, and Sm-method that is recently developed for the direct determination of decay series alpha-emitters and confirmed that all analytical methods are reliable for the determination of U-238 and Th-232. But radio-disequilibrium enrichment of daughter nuclides is detected by Sm-method. The results imply that the soft-error probability must be evaluated by the analysis of all decay series alpha-emitters. (author abst.) |
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