Ar+ Implantaion Effects on the Microstructure of Diamondlike Carbon Films Deposited by IBAD Technique.

Accession number;01A0141372
Title;Ar+ Implantaion Effects on the Microstructure of Diamondlike Carbon Films Deposited by IBAD Technique.
Author; PRABHJYOT PAL J (National Chemical Lab., Pune, Ind)
Journal Title;New Diam Front Carbon Technol
Journal Code:L1952A
ISSN:1344-9931
VOL.10;NO.6;PAGE.397-405(2000)
Figure&Table&Reference;FIG.3, TBL.2, REF.27
Pub. Country;Japan
Language;English
Abstract;