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Accession number;01A1026227
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| Title;Consideration of a Giant Magnetostrictive Thin Film to the Sensor. |
| Author;
MAKIMURA MIKA
(Ind. Res. Inst. of Nagano)
WAKIWAKA HIROYUKI
(Shinshu Univ., Fac. of Eng.)
YAMADA YOJI
(Shinshu Univ., Fac. of Eng.)
WATANABE TOSHIHIKO
(Fdk)
UMEMOTO YOSHIYUKI
(Fdk)
KIYOMIYA TERUO
(Fdk)
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Journal Title;Naganoken Kogyo Shikenjo Kenkyu Hokoku
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Journal Code:Y0010A
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ISSN:0913-672X
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VOL.;NO.21;PAGE.47-50(2001)
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| Figure&Table&Reference;FIG.9, TBL.2, REF.3 |
| Pub. Country;Japan |
| Language;Japanese |
| Abstract;We developed a giant magnetostrictive material thin film to apply to sensors and micro-actuators. In this paper, the influence on magnetostriction characteristics of magnetron sputtered film by a sputtering condition was examined. And the giant magnetostrictive thin film was applied to a force sensor. This paper describes the following things; (1) Tb composition of a film is 40at%, (2) the magnetostriction of a film is 702ppm at an anneal temperature of 300.DEG.C., (3) the application of the force sensor with meander coil is possible. (author abst.) |
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