The substrate temperature effects on cBN thin film growth in ICP-CVD.

Accession number;02A0383198
Title;The substrate temperature effects on cBN thin film growth in ICP-CVD.
Author; YANG H S (Univ. Tokyo) IWAMOTO C (Univ. Tokyo) YOSHIDA T (Univ. Tokyo)
Journal Title;Abstracts. Meeting of JIM
Journal Code:S0988A
ISSN:1342-5730
VOL.130th;NO.;PAGE.228(2002)
Figure&Table&Reference;FIG.1
Pub. Country;Japan
Language;English
Abstract;
Related Articles;
Loading...