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Comparison of mechanical and tribological properties of TiNx prepared by ECR sputtering and PVD methods.

Accession number;02A0383650

Title;Comparison of mechanical and tribological properties of TiNx prepared by ECR sputtering and PVD methods.

Author; LUNGU C P (Japan Ultra-high Temperature Materials Res. Inst.) HAYASHI S (Japan Ultra-high Temperature Materials Res. Inst.) IWASAKI K (Japan Ultra-high Temperature Materials Res. Inst.) IWATA H (Yokohama National Univ.) AOKI K (Yokohama National Univ.) AZUSHIMA A (Yokohama National Univ.)

Journal Title;Abstracts. Meeting of JIM

Journal Code:S0988A

ISSN:1342-5730

VOL.130th;NO.;PAGE.380(2002)

Figure&Table&Reference;

Pub. Country;Japan

Language;English

Abstract;

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