Photoluminescence properties of hydrogenated amorphous silicon nitride.
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Accession number;02A0423793
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| Title;Photoluminescence properties of hydrogenated amorphous silicon nitride. |
| Author;
KASHIO N
(Waseda Univ., Tokyo, Jpn)
KATO H
(Waseda Univ., Tokyo, Jpn)
OHKI Y
(Waseda Univ., Tokyo, Jpn)
SEOL K S
(Riken, Saitama, Jpn)
NOMA T
(Sanyo Electric Co. Ltd., Gunma, Jpn)
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Journal Title;Proceedings of the Symposium on Electrical and Electronic Insulating Materials and Applications in Systems
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Journal Code:G0398B
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ISSN:
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VOL.33rd;NO.;PAGE.79-82(2001)
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| Figure&Table&Reference;FIG.7, TBL.1, REF.11 |
| Pub. Country;Japan |
| Language;English |
| Abstract; |
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