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Assembly of three-dimensional microstructures in a scanning electron microscope: The technique and its application to the photonic science.

Accession number;03A0051779

Title;Assembly of three-dimensional microstructures in a scanning electron microscope: The technique and its application to the photonic science.

Author; MIYAZAKI H T (National Inst. Materials Sci., Ibaraki, Jpn)

Journal Title;Abstr RIES Hokudai Symp

Journal Code:L3994A

ISSN:

VOL.3rd;NO.;PAGE.32-33(2001)

Figure&Table&Reference;FIG.1, REF.5

Pub. Country;Japan

Language;English

Abstract;

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