Finer features for functional microdevices.

Accession number;03A0051792
Title;Finer features for functional microdevices.
Author; KAWATA S (Osaka Univ., Osaka, Jpn)
Journal Title;Abstr RIES Hokudai Symp
Journal Code:L3994A
ISSN:
VOL.3rd;NO.;PAGE.67-68(2001)
Figure&Table&Reference;FIG.2
Pub. Country;Japan
Language;English
Abstract;