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Structural and electrical studies of AlN films grown on atomically smooth 6H-SiC substrates.

Accession number;03A0051805

Title;Structural and electrical studies of AlN films grown on atomically smooth 6H-SiC substrates.

Author; YAMADA S (Hokkaido Univ., Sapporo, Jpn) KATO J (Hokkaido Univ., Sapporo, Jpn) TANAKA S (Hokkaido Univ., Sapporo, Jpn) SUEMUNE I (Hokkaido Univ., Sapporo, Jpn) HASHIZUME T (Hokkaido Univ., Sapporo, Jpn) AVRAMESCU A (Inst. Physical And Chemical Res. (riken), Saitama, Jpn) AOYAGI Y (Inst. Physical And Chemical Res. (riken), Saitama, Jpn)

Journal Title;Abstr RIES Hokudai Symp

Journal Code:L3994A

ISSN:

VOL.3rd;NO.;PAGE.97-98(2001)

Figure&Table&Reference;FIG.1, REF.3

Pub. Country;Japan

Language;English

Abstract;

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