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Accession number;03A0133878
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| Title;Supercomputing of Plasma and Rarefied Flow in an Inductively Coupled Plasma Reactor. |
| Author;
SHIOZAWA M
(Tohoku Univ.)
NANBU K
(Tohoku Univ.)
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Journal Title;NEC Res Dev
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Journal Code:G0138A
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ISSN:0547-051X
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VOL.44;NO.1;PAGE.121-126(2003)
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| Figure&Table&Reference;FIG.7, REF.9 |
| Pub. Country;Japan |
| Language;English |
| Abstract;Particle modeling of inductively coupled chlorine plasmas is performed using the SX-5. The flow field of background gas is simulated using the direct simulation Monte Carlo (DSMC) method and the structure of plasma is examined by use of the electron Monte Carlo simulation. Using the plasma current that is obtained from the electron Monte Carlo simulation, electromagnetic field and plasma structure are determined self-consistently, including effects of collisionless heating. Spatial distributions of electromagnetic field, electron density and temperature, and rates of dissociation and dissociative attachment are obtained together with flow fields of Cl2 and Cl. (author abst.) |
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