Damage free HRTEM observation of cBN films deposited on ultra-thin Si substrates.

Accession number;03A0279538
Title;Damage free HRTEM observation of cBN films deposited on ultra-thin Si substrates.
Author; YANG H (Univ. Tokyo) IWAMOTO C (Univ. Tokyo) YOSHIDA T (Univ. Tokyo)
Journal Title;Abstracts. Meeting of JIM
Journal Code:S0988A
ISSN:1342-5730
VOL.132nd;NO.;PAGE.271(2003)
Figure&Table&Reference;
Pub. Country;Japan
Language;English
Abstract;
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