Performance of 320 * 240 Bolometer-Type Uncooled Infrared Detector

Accession number;03A0296569
Title;Performance of 320 * 240 Bolometer-Type Uncooled Infrared Detector
Author; ODA N (Nec Corp.) TANAKA Y (Nec Electronics Corp.) SASAKI T (Nec Corp.) AJISAWA A (Nec Corp.) KAWAHARA A (Nec Corp.) KURASHINA S (Nec Glass Components, Ltd.)
Journal Title;NEC Res Dev
Journal Code:G0138A
ISSN:0547-051X
VOL.44;NO.2;PAGE.170-174(2003)
Figure&Table&Reference;FIG.5, REF.7
Pub. Country;Japan
Language;English
Abstract;The performance of a 320 * 240 bolometer-type uncooled infrared (IR) detector is described. Vanadium oxide thin film is adopted for the bolometer material, having a sheet resistance of -10k.OMEGA./square. It is patterned so that the bolometer resistance is by a factor of 10 larger than the sheet resistance. This process can increase responsivity. The on-chip readout integrated circuit is designed to reduce signal drift induced by a fluctuation in operation temperature, by referring signals of pixels for which incident IR radiation is not introduced. A thermal image with an NETD (noise equivalent temperature difference) value smaller than 0.1K is shown for F/1 optics and at 60Hz frame rate. (author abst.)