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Accession number;03A0296569
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| Title;Performance of 320 * 240 Bolometer-Type Uncooled Infrared Detector |
| Author;
ODA N
(Nec Corp.)
TANAKA Y
(Nec Electronics Corp.)
SASAKI T
(Nec Corp.)
AJISAWA A
(Nec Corp.)
KAWAHARA A
(Nec Corp.)
KURASHINA S
(Nec Glass Components, Ltd.)
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Journal Title;NEC Res Dev
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Journal Code:G0138A
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ISSN:0547-051X
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VOL.44;NO.2;PAGE.170-174(2003)
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| Figure&Table&Reference;FIG.5, REF.7 |
| Pub. Country;Japan |
| Language;English |
| Abstract;The performance of a 320 * 240 bolometer-type uncooled infrared (IR) detector is described. Vanadium oxide thin film is adopted for the bolometer material, having a sheet resistance of -10k.OMEGA./square. It is patterned so that the bolometer resistance is by a factor of 10 larger than the sheet resistance. This process can increase responsivity. The on-chip readout integrated circuit is designed to reduce signal drift induced by a fluctuation in operation temperature, by referring signals of pixels for which incident IR radiation is not introduced. A thermal image with an NETD (noise equivalent temperature difference) value smaller than 0.1K is shown for F/1 optics and at 60Hz frame rate. (author abst.) |
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