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Accession number;04A0165447
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| Title;Transfer Robot for the Seventh Generation Glass Substrate "Linkage Type Robot/SJ50C""Gate Type Robot/GH50C" |
| Author;
SAIKA ATSUSHI
(Nachi-Fujikoshi Corp.)
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Journal Title;Nachi Bus News
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Journal Code:F0439A
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ISSN:
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VOL.2;NO.B1-B4;PAGE.25-31(2004)
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| Figure&Table&Reference;FIG.7, TBL.1 |
| Pub. Country;Japan |
| Language;Japanese |
| Abstract;We have developed two types of Transfer Robots that can transfer the seventh generation glass substrate (2*2.2m) used in a flat panel display like the Liquid Crystal Display (LCD). Robots feature the greater degree of movement that has been required for the handling of the large-size glass substrate and the high rigidity to avoid warping that may be resulted from transferring of heavy substrates. In addition, the robots are rated for Class 10 of cleanliness with no dust emission and are designed to transfer the glass substrate between machines and cassettes in Clean Room. (author abst.) |
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