Monte Carlo Simulation of Thin Film Growth with Defect Formation-Application to Via Filling-.
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Accession number;04A0241415
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| Title;Monte Carlo Simulation of Thin Film Growth with Defect Formation-Application to Via Filling-. |
| Author;
KANEKO Y
(Kyoto Univ., Kyoto, Jpn)
HIWATARI Y
(Kanazawa Univ., Kanazawa, Jpn)
OHARA K
(C. Uyemura & Co., Ltd., Osaka, Jpn)
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Journal Title;Int Conf Mol Simul Comput Sci Work 2004
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Journal Code:M20040005
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ISSN:
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VOL.;NO.;PAGE.66-67(2004)
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| Figure&Table&Reference;FIG.1, REF.3 |
| Pub. Country;Japan |
| Language;English |
| Abstract; |
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