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Accession number;04A0418347
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| Title;MEMS Variable Optical Attenuator using Asymmetricaly Driven Parallel Plate Tilt Mirror |
| Author;
ISAMOTO KEIJI
(Santekku Seihinkaihatsubu)
MOROSAWA ATSUSHI
(Santekku Seihinkaihatsubu)
TEI MASATAKA
(Santekku Seihinkaihatsubu)
FUJITA HIROYUKI
(Univ. Tokyo, Inst. Ind. Sci., JPN)
TOSHIYOSHI HIROSHI
(Univ. Tokyo, Inst. Ind. Sci., JPN)
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Journal Title;Transactions of the Institute of Electrical Engineering of Japan. E
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Journal Code:L3098A
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ISSN:1341-8939
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VOL.124;NO.6;PAGE.213-218(2004)
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| Figure&Table&Reference;FIG.10, TBL.2, REF.11 |
| Pub. Country;Japan |
| Language;Japanese |
| Abstract;A Micro mechanism variable optical attenuator (VOA) using the electrostatic micro torsion mirror and the fiber optic collimators was developed. The ASymmetricay driven Parallel plate(ASP)Tilt Mirror(TM) ) was designed in order to obtain high productivity and advanced mechanism reliability. The optical characteristic was excellent as an optical communication network, and 0.8dB insertion loss and 0.2dB polarization dependence loss were obtained. The structure of ASP type TM is very simple, and it is produced by using bulk micromachining of the SOI wafer. As a result, the VOA package was able to be reduced to 5.6mm in diameter and 23mm in length. |
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