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Accession number;04A0505564
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| Title;International Standardization of Sensors and Micromachines |
| Author;
OWADA KUNIKI
(Kokusaihyojunkakogakuken)
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Journal Title;Transactions of the Institute of Electrical Engineering of Japan. E
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Journal Code:L3098A
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ISSN:1341-8939
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VOL.124;NO.7;PAGE.238-241(2004)
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| Figure&Table&Reference;FIG.4, REF.3 |
| Pub. Country;Japan |
| Language;Japanese |
| Abstract;With the development of the sensors and the micromachine technology, the importance and methodology of international standardization is described. The following were introduced on concrete problems such as semiconductor pressure sensor, Hall elements, semiconductor accelerometers, micromachine terminology, micromachine material evaluation method. The present state of the international standardization and future trend were introduced. |
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