MEMS Technologies for Ubiquitous Computing World: Silicon to Silicone: Stretching the Capabilities of Micromachines with Electroactive Polymers
|
Accession number;04A0566249
|
| Title;MEMS Technologies for Ubiquitous Computing World: Silicon to Silicone: Stretching the Capabilities of Micromachines with Electroactive Polymers |
| Author;
KORNBLUH R
(Sri International, California)
PELRINE R
(Sri International, California)
PRAHLAD H
(Sri International, California)
CHIBA S
(Sri International, California)
|
Journal Title;Transactions of the Institute of Electrical Engineering of Japan. E
|
Journal Code:L3098A
|
ISSN:1341-8939
|
|
VOL.124;NO.8;PAGE.266-271(2004)
|
| Figure&Table&Reference;FIG.6, TBL.1, REF.18 |
| Pub. Country;Japan |
| Language;English |
| Abstract;Dielectric electroactive polymer transducers have many features that are desirable for MEMS devices. An especially atractive type of electroactive polymer is dielectric elastomer. Dielectric elastomers, tranducers that couple the deformation of a rubbery polymer film to an applied electric field, show particular promise with features such as simple fabrication in a variety of size scales, high strain and energy density, high efficiency and fast speed of response, and inherent flexibility, environment tolerance, and ruggedness. A variety of actuator configulations has been demonstrated at the small size scales needed for MEMS devices, including rolled "artificial muscle" actuators, framed and bending beam actuators for efficient opto-mechanical switches, and diaphragm and thickness mode actuators for pumps and valves. |
|
|
|
Related Articles;
|
|
|
