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Accession number;04A0566251
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| Title;MEMS Technologies for Ubiquitous Computing World: Electromagnetic Micro Actuator using Micro Coils for Hard Disk Drives |
| Author;
NANIWA IRIZO
(Hitachi, Ltd.)
NAKAMURA SHIGEO
(Hitachigurobarusutorejitekunorojizu)
SATO KAZUTAKA
(Hitachi, Ltd.)
ARISAKA TOSHIHIRO
(Hitachi, Ltd.)
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Journal Title;Transactions of the Institute of Electrical Engineering of Japan. E
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Journal Code:L3098A
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ISSN:1341-8939
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VOL.124;NO.8;PAGE.278-283(2004)
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| Figure&Table&Reference;FIG.10, TBL.3, REF.9 |
| Pub. Country;Japan |
| Language;Japanese |
| Abstract;This paper describes a prototype of the eectromagnetic micro actuator for dual-stage positioning. It is composed of a yoke supported by the cross-shaped spring and the four micro coils. The driving force of this actuator is the electromagnetic force generated by those coils. The displacement was 3.2.MU.m at the frequency of 2kHz with the applied voltage of 2.1 V. The linearity between the coil current and the displacement was fairly good by the differential current driving method. The first and second resonant frequency were 580Hz and 20kHz respectively. |
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