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Accession number;04A0719591
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| Title;Polymer-MEMS and Its Applications |
| Author;
SHOJI SHUICHI
(Waseda Univ., School of Sci. & Engineering, JPN)
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Journal Title;Transactions of the Institute of Electrical Engineering of Japan. E
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Journal Code:L3098A
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ISSN:1341-8939
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VOL.124;NO.10;PAGE.349-353(2004)
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| Figure&Table&Reference;FIG.5, REF.25 |
| Pub. Country;Japan |
| Language;Japanese |
| Abstract;The present technologies of polymer MEMS, such as bulk polymer microstructure fabrication by the mold technology and three-dimensional microstructure by the photopolymer and photoresist and surface micromachining using the polymer, were introduced. In the field of the .MU.TAS (Micro Total Analysis System), LOC(Lob-on-a-Chip) and BioMEMS for the purpose of the application of MEMS technology to chemistry and biochemistry, the micro device using various polymers has been produced experimentally and has been evaluated from the view of the biocompatibility and the cost. |
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