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Accession number;04A0719592
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| Title;Fabrication of Movable Mirror-Array Structure Using Hot-Embossing for Optical Switch Applications |
| Author;
IKEHARA TSUYOSHI
(Inst. Mechanical Systems Enginnering, National Inst. Advanced Industrial Sci. and Technol., JPN)
SHAN X C
(Singapore Inst. Of Manufacturing Technol. (simtech), Singapore, Sgp)
OTOMO MAKOTO
(Ikegami Mold Eng. Co., Ltd.)
MAEDA RYUTARO
(Inst. Mechanical Systems Enginnering, National Inst. Advanced Industrial Sci. and Technol., JPN)
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Journal Title;Transactions of the Institute of Electrical Engineering of Japan. E
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Journal Code:L3098A
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ISSN:1341-8939
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VOL.124;NO.10;PAGE.354-358(2004)
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| Figure&Table&Reference;FIG.5, REF.10 |
| Pub. Country;Japan |
| Language;Japanese |
| Abstract;The prototype by micromachined three-dimensional silicon structures was transferred to the metal mold, and polymer was produced by hot-embossing. A polymer optical switch which realized high accuracy in silicon machining process and low cost in production was fabricated experimentally. Optical switch structure with the electrostatic drive cantilever moving part which suited the condition of the hot-embossing was designed, and the high-density arrangement with port number 8X8 was realized. The metal mold of Ni was made from the prototype of the silicon by the electroplating, and the polymer structure was hot-embossed. The cantilever mobile structure was formed in the laser cutting. The polymer optical switch was assembled, and it was confirmed to move actually. |
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