|
Accession number;04A0719594
|
| Title;Fabrication of the Perfluoro Polymer Passivated PDMS Microstructure |
| Author;
UCHIDA DAISUKE
(Waseda Univ., School of Sci. & Engineering, JPN)
KANAI MASAKI
(Waseda Univ., School of Sci. & Engineering, JPN)
NISHIMOTO TAKAHIRO
(Shimadzu Corp., JPN)
SHOJI SHUICHI
(Waseda Univ., School of Sci. & Engineering, JPN)
|
Journal Title;Transactions of the Institute of Electrical Engineering of Japan. E
|
Journal Code:L3098A
|
ISSN:1341-8939
|
|
VOL.124;NO.10;PAGE.364-368(2004)
|
| Figure&Table&Reference;FIG.9, REF.6 |
| Pub. Country;Japan |
| Language;Japanese |
| Abstract;The PDMS(Poldimethylsiloxane) structure that was coded by CYTOP which is an amorphous fluorocarbon resin was realized. It was confirmed that CYTOP has been covered perfectly on the microstructure of the micron order of PDMS without hurting. And, it was confirmed that the composition of CYT OP was almost equal to the composition of PTFE by the surface chemical analysis by XPS. The method for producing the electrode on the PDMS structure which coated CYTOP was proposed, and the inactivation surface state of CYTOP should be keeped using the solid shadow mask, and the technique which produces the electrode was established. |
|
|
|
Related Articles;
|
|
