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Accession number;04A0719597
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| Title;Electrostatic Micro Actuator with Distributed Ciliary Electrodes (E-Maccel) |
| Author;
MINAMI K
(Yamaguchi Univ., Ube)
YANO S
(Yamaguchi Univ., Ube)
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Journal Title;Transactions of the Institute of Electrical Engineering of Japan. E
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Journal Code:L3098A
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ISSN:1341-8939
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VOL.124;NO.10;PAGE.381-386(2004)
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| Figure&Table&Reference;FIG.14, REF.10 |
| Pub. Country;Japan |
| Language;English |
| Abstract;We have developed Electrostatic Micro Actuator with Distributed Ciliary Electrodes(E-Maccel). Fundamental features of the produced actuator were evaluated. This actuator consists of two fixed electrodes having many cillary electrodes distributed on a plate, and a moving electrode that is sandwiched by the fixed electrodes. The ciliary electrodes are made of two-layer polyimid film. The E-Maccel was produced by micromachinning. The produced E-Maccel was driven, and the movement of 9.6 .MU.m/cycle was observed at the driving voltage of 150V. |
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