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Accession number;04A0885119
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| Title;Improvement of an Active Temperature Measurement Cantilever of a Scanning Thermal Microscope |
| Author;
NAKABEPPU OSAMU
(Tokyo Inst. Technology, Graduate School of Sci. and Engineering, JPN)
KANDA TAKAHIRO
(Tokyo Inst. of Technol. Fac. of Eng.)
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Journal Title;Transactions of the Institute of Electrical Engineering of Japan. E
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Journal Code:L3098A
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ISSN:1341-8939
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VOL.124;NO.12;PAGE.453-458(2004)
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| Figure&Table&Reference;FIG.9, TBL.3, REF.18 |
| Pub. Country;Japan |
| Language;Japanese |
| Abstract;The outline of active tempatature measurement method in the scanning thermal microscopy ( SThM : Scanning Thermal Microscope ) was described.Experimental result and consideration on the sensitization of the thermomal microscopy of the cantilever by reducing its thickness were shown.Through temperature distribution measurement of the waveguide optical switch, the advantage and problem of SThM were examined.It succeeded in the trial manufacture of tempatature measurement cantilever of about 60%(2.MU.m) as compared to the convetional thickness.By reducing its thickness, the thermal resistance of the cantilever increased at one digit, and it became the 105 kW/W order, and the quantitative temparature measurement became possible by small heat flow gain.In addition,temparature distribution of a wave guide optical switch including low thermal conductive polymer and metal heater was visualized quantitatively with the improved cantilever. |
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