Electronic Transport through Aromatic Thiol Monolayer Assembled in the Nano Via-Hole Electrode
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Accession number;05A0303243
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| Title;Electronic Transport through Aromatic Thiol Monolayer Assembled in the Nano Via-Hole Electrode |
| Author;
LEE C
(Korea Res. Inst. Of Chemical Technol., Daejeon, Kor)
KANG Y
(Korea Res. Inst. Of Chemical Technol., Daejeon, Kor)
KIM J-H
(Ajou Univ., Suwon, Kor)
CHOI S-W
(Ajou Univ., Suwon, Kor)
KIM J
(Korea Res. Inst. Of Standards And Sci., Daejeon, Kor)
SOH H M
(Korea Res. Inst. Of Standards And Sci., Daejeon, Kor)
LEE H
(Electronics And Telecommunication Res. Inst., Daejeon, Kor)
KIM D
(Electronics And Telecommunication Res. Inst., Daejeon, Kor)
SONG C K
(Dong-a Univ., Pusan, Kor)
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Journal Title;Jpn J Appl Phys Part 1
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Journal Code:G0520B
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ISSN:0021-4922
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VOL.44;NO.1B;PAGE.530-534(2005)
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| Figure&Table&Reference;FIG.6, TBL.1, REF.20 |
| Pub. Country;Japan |
| Language;English |
| Abstract;Nano via-hole devices were fabricated by the e-beam patterning of holes on a SiNx insulating layer and used as electronic test platforms for the characterization of the electrical properties of molecules. Conditions of RIE were controlled to produce bowl-shaped nano size via-holes such that the diameter of the bottom opening was less than approximately 50 nm when the top diameter was 100 nm. After forming a self-assembled monolayer on the bottom electrode inside the via-hole, a top metal electrode was deposited to produce an MIM type device. When dodecanethiol was used, the fabricated device showed a current density of 1.3*103 A/cm2 at 1.0 V, which was in the same order of magnitude as the previously reported value. When aromatic thiols were used, most devices showed diode-like behaviors with a higher current density than the dodecanethiol, and a few showed NDR-like characteristics. (author abst.) |
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