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Accession number;06A0102403
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| Title;Laser weld sealing equipment for electronic device |
| Author;
HIROTA HIROYOSHI
(Paioniafa Kaihatsusuishimbu)
SAKAGUCHI YOSHIKAZU
(Paioniafa Kaihatsusuishimbu)
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Journal Title;Pioneer R&D
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Journal Code:L0992B
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ISSN:1346-7468
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VOL.16;NO.1;PAGE.25-32(2006)
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| Figure&Table&Reference;FIG.9, TBL.2 |
| Pub. Country;Japan |
| Language;Japanese |
| Abstract;We developed an airtight sealing system for ceramic packages of electric devices. Also, we realized higher speed and high accuracy using laser welding for sealing, using a positioning compensation image processor with the combination of galvano -scanner and X-Y table. Also, we achieved zero gas in the ceramic package by means of welding in the vacuum chamber, which provides high reliability for the electric devices. (author abst.) |
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