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Optimization of a gas jet-type Z-pinch discharge EUV light source

Accession number;06A0414372

Title;Optimization of a gas jet-type Z-pinch discharge EUV light source

Author; IIZUKA NAOYA (Tokyo Inst. Technol.) SAKAMOTO TOSHIRO (Tokyo Inst. Technol.) KOBAYASHI YASUNORI (Tokyo Inst. Technol.) SONG INHO (Tokyo Inst. Technol.) MOHANTY S. R. (Tokyo Inst. Technol.) WATANABE MASAHITO (Tokyo Inst. Technol.) OKINO AKITOSHI (Tokyo Inst. Technol.) HOTTA EIKI (Tokyo Inst. Technol.)

Journal Title;Nippon Bunko Gakkai Koen Yoshishu

Journal Code:L0419A

ISSN:

VOL.2006;NO.;PAGE.84(2006)

Figure&Table&Reference;

Pub. Country;Japan

Language;English

Abstract;

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