Spectroscopic characteristics of pulse operated high power multi-gas inductively coupled plasma

Accession number;06A0414389
Title;Spectroscopic characteristics of pulse operated high power multi-gas inductively coupled plasma
Author; MIYAHARA HIDEKAZU (Tokyo Inst. Technol.) MIYAHARA HIDEKAZU (Jsps Res. Fellow) KAGEYASU TAICHI (Tokyo Inst. Technol.) TAKIMOTO KAZUYASU (Tokyo Inst. Technol.) HOTTA EIKI (Tokyo Inst. Technol.) SHIMADA RYUICHI (Tokyo Inst. Technol.) OKINO AKITOSHI (Tokyo Inst. Technol.)
Journal Title;Nippon Bunko Gakkai Koen Yoshishu
Journal Code:L0419A
ISSN:
VOL.2006;NO.;PAGE.101(2006)
Figure&Table&Reference;
Pub. Country;Japan
Language;English
Abstract;
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