Modeling of Conversion Efficiency for Discharge-Pumped Extreme-Ultraviolet Sources
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Accession number;06A0414401
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| Title;Modeling of Conversion Efficiency for Discharge-Pumped Extreme-Ultraviolet Sources |
| Author;
MASNAVI M.
(Tokyo Inst. Technol., Yokohama Jpn)
NAKAJIMA M.
(Tokyo Inst. Technol., Yokohama Jpn)
SASAKI A.
(Japan Atomic Energy Res. Inst., Kyoto, Jpn)
HOTTA E.
(Tokyo Inst. Technol., Yokohama Jpn)
HORIOKA K.
(Tokyo Inst. Technol., Yokohama Jpn)
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Journal Title;Nippon Bunko Gakkai Koen Yoshishu
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Journal Code:L0419A
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ISSN:
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VOL.2006;NO.;PAGE.113(2006)
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| Figure&Table&Reference; |
| Pub. Country;Japan |
| Language;English |
| Abstract; |
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