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Accession number;06A0822843
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| Title;Electron Beam Recorder for Next-Generation Superhigh-Density Disk Media |
| Author;
KITAHARA HIROAKI
(Pioneer Corp., JPN)
KOJIMA YOSHIAKI
(Pioneer Corp., JPN)
KOBAYASHI MASAKI
(Pioneer Corp., JPN)
WADA YASUMITSU
(Pioneer Corp., JPN)
KATSUMURA MASAHIRO
(Pioneer Corp., JPN)
IIDA TETSUYA
(Pioneer Corp., JPN)
KURIYAMA KAZUMI
(Pioneer Corp., JPN)
YOKOGAWA FUMIHIKO
(Pioneer Corp., JPN)
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Journal Title;Pioneer R&D
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Journal Code:L0992B
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ISSN:1346-7468
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VOL.16;NO.2;PAGE.7-12(2006)
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| Figure&Table&Reference;FIG.121, TBL.1, REF.10 |
| Pub. Country;Japan |
| Language;Japanese |
| Abstract;Electron beam mastering is expected to be a key technology indispensable to realize the next-generation optical disc for post Blu-ray discs and patterned magnetic disk media. We developed a high-resolution electron beam recorder (EBR) to realize such next-generation high-density disk media. From experimental results, a superhigh-density patterning of capacity equivalent to 510GB was achieved using the EBR. The recording stability was proven by fabricating 100-GB-capacity stampers with good pattern size uniformity. This technology is introduced into the commercial EBRs of Pioneer FA corporation. (author abst.) |
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