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Accession number;07A0043247
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| Title;Calibration method for measurement instrument of thermal effusivity in local area II |
| Author;
MATSUI GENZO
(Beteru)
HATORI KIMIHITO
(Beteru)
IKEUCHI SATOAKI
(National Inst. Advanced Industrial Sci. and Technol., JPN)
YAGI TAKASHI
(National Inst. Advanced Industrial Sci. and Technol., JPN)
KATO HIDEYUKI
(National Inst. Advanced Industrial Sci. and Technol., JPN)
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Journal Title;Thermophys Prop
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Journal Code:X0031A
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ISSN:0911-1743
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VOL.27th;NO.;PAGE.133-135(2006)
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| Figure&Table&Reference;FIG.5, REF.6 |
| Pub. Country;Japan |
| Language;Japanese |
| Abstract;Measurement instrument of thermal effusivity in local area "Thermal Microscope (TM)" has been developed. This apparatus is based on a periodical heating method using thermoreflectance technique. The thermal microscope (TM) is considerably useful to evaluate thermophysical property of remarkable materials such as micron scale structures including thin films. In this work, we show how to calibrate thermal effusivity of specimens from result of phase lag between phase of modulated heating laser and that of thermoreflectance signal. Before the measurement, samples were prepared to be coated with a 100nm Mo film by means of sputtering, where the Mo coating acts as a reflective layer. The sputtering was carried out in Ar atmosphere, 6Pa of Ar pressure at room temperature. The phase lag for a Pyrex glass can be predicted by a one-dimensional heat conduction model. On the other hand, when thermal effusivity in sample becomes larger than that in Pyrex, we must consider that measurement results deviate from one-dimensional heat conduction model. We successfully show that the relation between experimental phase lag and thermal effusivity in known samples can be fitted on exponential function. Therefore, we are able to estimate the value of thermal effusivity for materials using this exponential function as a calibration curve. (author abst.) |
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