THERMAL RADIATIVE TRANSMISSION PROPERTY OF SILICA MICRO PERIODIC STRUCTURES

Accession number;07A0043211
Title;THERMAL RADIATIVE TRANSMISSION PROPERTY OF SILICA MICRO PERIODIC STRUCTURES
Author; KIHARA MASAHIRO (Kyushu Inst. Technol., JPN) MIYAZAKI KOJI (Kyushu Inst. Technol., JPN) TSUKAMOTO HIROSHI (Kyushu Inst. Technol., JPN)
Journal Title;Thermophys Prop
Journal Code:X0031A
ISSN:0911-1743
VOL.27th;NO.;PAGE.27-29(2006)
Figure&Table&Reference;FIG.9, REF.5
Pub. Country;Japan
Language;Japanese
Abstract;The radiant flux transmitted through the micro periodic structures assembled with silica micro-spheres over a Si substrate is measured by using a radiant flux sensor. The thermal radiation can be reflected wavelength selectively by Bragg reflection which is caused by the silica micro periodic structures. Therefore silica micro periodic structures are anticipated for the modification of thermal reflection in a furnace. The silica micro periodic structures well defined thickness are fabricated by using a colloidal technique over 4 inch Si substrate (Fig. 1). The characterization of sample is observed with SIM (Fig. 2). The close packed structures of silica micro-spheres are formed over a large area. The spectral reflectance and transmittance are measured by using an FT-IR (Figs. 3-6). The peak of spectral reflectance is appeared at specific wavelength, and the dip of spectral transmittance is appeared at the same wavelength. The radiant flux transmitted through the sample is measured. The emitter is ceramic heater. The sample is set at the middle position between emitter and sensor. The radiant flux transmitted through the samples is measured with a radiant flux sensor (0.318[.MU.V/(W/m'2')], captec). If the silica micro periodic structure is not effective for reflection, the transmitted radiant flux decreases exponentially as thickness increase. However, the samples of 2.MU.m silica spheres suppress the transmission more than that of 3.MU.m (Fig. 6). When the thermal radiation intensity peak of an emitter matches to the reflection intensity peak of periodic structure, the transmission is more suppressed effectively. (author abst.)